壓力傳感器類型

640B絕對壓力器

641B集成儀表壓力控制器

?  640B

?  641B

Pressure Ranges (Full Scales)

壓力范圍（滿刻度）

10, 100, 1000 mmHg (Torr); 60, 100 psi

Transducer Overpressure Limit

傳感器過壓限值

45 psia or 2x Full Scale, whichever is greater

Orifice Full Scale Ranges

孔板滿標度范圍

50, 200, 1000,   5000, 10000, 20000, 50000 sccm

 (nominal Full Scale flow rates for N2 with 15 psig on   inlet and atm. on outlet)

Maximum Differential Pressure

(consistent with transducer overpressure limit)

最大壓差（與傳感器過壓限值一致）

?  150 psi for 50 to 10,000 sccm orifices

?  30 psi for 20,000 and 50,000 sccm orifices

Control Mode

控制模式

Downstream standard; Upstream optional

Performance 表現(xiàn)

Pressure Reading  壓力讀數(shù)精度                           

  Accuracy Temp. Coefficients臨時系數(shù)

Time Response時間響應(yīng)

?  ±0.5% of Reading (includes linearity, hysteresis, and repeatability)

?  Zero: ±0.02% of Full Scale/°C

?  Span: ±0.04% of Reading/°C

? <100 msec

Pressure Control 壓力控制裝置                         

 Range 范圍

Accuracy 精確

Time Response 時間響應(yīng)

?  >2 to 100% of Full Scale

?  ±0.2% of Full Scale

? <1.0 sec (excluding system time constant)

Environmental 環(huán)境方面

Operating Temperature

0° to 50°C (32° to 122°F)

Storage Temperature

-20° to 80°C (-4° to 176°F)

Electrical與電有關(guān)

Power Required

±15 VDC ±5%, 200 mA max.

Input/Output Signals

輸入/輸出信號

0-5 VDC standard; 0-10 VDC optional

Connector連接器

15-pin male type “D”

Cable Length電纜長度

100 ft. (30 m) max.

RFI Sensitivity

RFI靈敏度

SAMA 33.1, 1-abc:<0.2% of Full Scale

Trip Points

Rated Adjustable Hysteresis Indicators

跳閘點

額定可調(diào)滯后指示器

?  Two open-collector transistors

?  250 mA @ 30 VDC

?  1 to 100% of Full Scale

?  3% of Full Scale

?  Green LEDs on when actuated

Compliance 合規(guī)性

CE

Mechanical

Materials   Exposed to Gas

接觸氣體的材料

Standard 標準

Optional可選擇的

?  316L S.S., 316L/VAR S.S., Inconel, Nickel

?  Viton?, Kalrez?, Kel-F?

Leak Integrity 泄漏完整性  

 External外部的

Internal1,2 (through closed valve)

內(nèi)部1,2（通過關(guān)閉的閥門）

? <10-9 scc/sec He

?  Elastomer valve:<10-4 scc/sec He

?  Metal valve:<1% of Full Scale. (N2 @ 1 atm. ?P)

?  Kel-F valve:<0.5% of Full Scale (N2 @ 1 atm. ?P)

Fittings配件

Swagelok? 4 VCR?, 8 VCR, or 1/4” Swagelok, Surface Mount

Dimensions尺寸

1.5'' (38.1   mm) x 4.88'' (124 mm) (4 VCR) x   5.50'' (140 mm) max.

Weight

2.54 lbs. (1.15 kg)